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1

Advanced electric-field scanning probe lithography on molecular resist using active cantilever

Kaestner, Marcus, Aydogan, Cemal, Ivanov, Tzvetan, Ahmad, Ahmad, Angelov, Tihomir, Reum, Alexander, Ishchuk, Valentyn, Krivoshapkina, Yana, Hofer, Manuel, Lenk, Steve, Atanasov, Ivaylo, Holz, Mathias,

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Année:

2015

Langue:

english

Fichier:

PDF, 12.78 MB

english, 2015

2

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 23 February 2014)] Alternative Lithographic Technologies VI - Electric field scanning probe lithography on molecular glass resists using self-actuating, self-sensing cantilever

Resnick, Douglas J., Bencher, Christopher, Kaestner, Marcus, Nieradka, Konrad, Ivanov, Tzvetan, Lenk, Steve, Krivoshapkina, Yana, Ahmad, Ahmad, Angelov, Tihomir, Guliyev, Elshad, Reum, Alexander, Budd

Année:

2014

Langue:

english

Fichier:

PDF, 1.24 MB

english, 2014

3

Components for high speed atomic force microscopy

Georg E. Fantner, Georg Schitter, Johannes H. Kindt, Tzvetan Ivanov, Katarina Ivanova, Rohan Patel, Niels Holten-Andersen, Jonathan Adams, Philipp J. Thurner, Ivo W. Rangelow, Paul K. Hansma

Journal:

Ultramicroscopy

Année:

2006

Langue:

english

Fichier:

PDF, 582 KB

english, 2006

4

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 21 February 2010)] Alternative Lithographic Technologies II - Nanoprobe maskless lithography

Rangelow, Ivo W., Ivanov, Tzvetan, Sarov, Yanko, Schuh, Andreas, Frank, Andreas, Hartmann, Hans, Zöllner, Jens-Peter, Olynick, Dierdre L., Kalchenko, V., Herr, Daniel J. C.

Année:

2010

Langue:

english

Fichier:

PDF, 3.50 MB

english, 2010

5

High-throughput process chain for single electron transistor devices based on field-emission scanning probe lithography and Smart Nanoimprint lithography technology

Lenk, Claudia, Krivoshapkina, Yana, Hofmann, Martin, Lenk, Steve, Ivanov, Tzvetan, Rangelow, Ivo W., Ahmad, Ahmad, Reum, Alexander, Holz, Mathias, Glinsner, Thomas, Eibelhuber, Martin, Treiblmayr, Dom

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Année:

2019

Langue:

english

Fichier:

PDF, 5.69 MB

english, 2019

6

Field-emission scanning probe lithography tool for 150 mm wafer

Holz, Mathias, Guliyev, Elshad, Ahmad, Ahmad, Ivanov, Tzvetan, Reum, Alexander, Hofmann, Martin, Lenk, Claudia, Kaestner, Marcus, Reuter, Christoph, Lenk, Steve, Rangelow, Ivo W., Nikolov, Nikolay

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Année:

2018

Langue:

english

Fichier:

PDF, 7.39 MB

english, 2018

7

Increased imaging speed and force sensitivity for bio-applications with small cantilevers using a conventional AFM setup

Michael Leitner, Georg E. Fantner, Ernest J. Fantner, Katerina Ivanova, Tzvetan Ivanov, Ivo Rangelow, Andreas Ebner, Martina Rangl, Jilin Tang, Peter Hinterdorfer

Journal:

Année:

2012

Langue:

english

Fichier:

PDF, 1.07 MB

english, 2012

8

[IEEE 2009 Joint 48th IEEE Conference on Decision and Control (CDC) and 28th Chinese Control Conference (CCC) - Shanghai, China (2009.12.15-2009.12.18)] Proceedings of the 48h IEEE Conference on Decision and Control (CDC) held jointly with 2009 28th Chinese Control Conference - Parametrization invariant covariance quantification in identification of transfer functions for linear systems

Ivanov, Tzvetan, Gevers, Michel

Année:

2009

Langue:

english

Fichier:

PDF, 798 KB

english, 2009

9

[IEEE 2008 47th IEEE Conference on Decision and Control - Cancun, Mexico (2008.12.9-2008.12.11)] 2008 47th IEEE Conference on Decision and Control - Application of real rational modules in system identification

Ivanov, Tzvetan, Absil, P.-A., Anderson, Brian D. O., Gevers, Michel

Année:

2008

Langue:

english

Fichier:

PDF, 304 KB

english, 2008

10

Fabrication of self-actuated piezoresistive thermal probes

Hofer, Manuel, Ivanov, Tzvetan, Rudek, Maciej, Kopiec, Daniel, Guliyev, Elshad, Gotszalk, Teodor P., Rangelow, Ivo W.

Journal:

Microelectronic Engineering

Année:

2015

Langue:

english

Fichier:

PDF, 1.61 MB

english, 2015

11

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 22 February 2015)] Alternative Lithographic Technologies VII - Advanced electric-field scanning probe lithography on molecular resist using active cantilever

Resnick, Douglas J., Bencher, Christopher, Kaestner, Marcus, Aydogan, Cemal, Lipowicz, Hubert-Seweryn, Ivanov, Tzvetan, Lenk, Steve, Ahmad, Ahmad, Angelov, Tihomir, Reum, Alexander, Ishchuk, Valentyn,

Année:

2015

Langue:

english

Fichier:

PDF, 3.79 MB

english, 2015

12

Fast atomic force microscopy with self-transduced, self-sensing cantilever

Ahmad, Ahmad, Ivanov, Tzvetan, Angelov, Tihomir, Rangelow, Ivo W.

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Année:

2015

Langue:

english

Fichier:

PDF, 4.68 MB

english, 2015

13

Large area fast-AFM scanning with active “Quattro” cantilever arrays

Ahmad, Ahmad, Nikolov, Nikolay, Angelov, Tihomir, Ivanov, Tzvetan, Reum, Alexander, Atanasov, Ivaylo, Guliyev, Elshad, Ishchuk, Valentyn, Kaestner, Marcus, Krivoshapkina, Yana, Lenk, Steve, Lenk, Clau

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Année:

2016

Langue:

english

Fichier:

PDF, 5.40 MB

english, 2016

14

Six-axis AFM in SEM with self-sensing and self-transduced cantilever for high speed analysis and nanolithography

Angelov, Tihomir, Ahmad, Ahmad, Guliyev, Elshad, Reum, Alexander, Atanasov, Ivaylo, Ivanov, Tzvetan, Ishchuk, Valentyn, Kaestner, Marcus, Krivoshapkina, Yana, Lenk, Steve, Lenk, Claudia, Rangelow, Ivo

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Année:

2016

Langue:

english

Fichier:

PDF, 2.53 MB

english, 2016

15

Review Article: Active scanning probes: A versatile toolkit for fast imaging and emerging nanofabrication

Rangelow, Ivo W., Ivanov, Tzvetan, Ahmad, Ahmad, Kaestner, Marcus, Lenk, Claudia, Bozchalooi, Iman S., Xia, Fangzhou, Youcef-Toumi, Kamal, Holz, Mathias, Reum, Alexander

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Année:

2017

Langue:

english

Fichier:

PDF, 5.07 MB

english, 2017

16

Nanofabrication by field-emission scanning probe lithography and cryogenic plasma etching

Lenk, Claudia, Hofmann, Martin, Lenk, Steve, Kaestner, Marcus, Ivanov, Tzvetan, Krivoshapkina, Yana, Nechepurenko, Diana, Volland, Burkhard, Holz, Mathias, Ahmad, Ahmad, Reum, Alexander, Wang, Chen, J

Journal:

Microelectronic Engineering

Année:

2018

Langue:

english

Fichier:

PDF, 1.16 MB

english, 2018

17

Atomic force microscope integrated with a scanning electron microscope for correlative nanofabrication and microscopy

Rangelow, Ivo W., Kaestner, Marcus, Ivanov, Tzvetan, Ahmad, Ahmad, Lenk, Steve, Lenk, Claudia, Guliyev, Elshad, Reum, Alexander, Hofmann, Martin, Reuter, Christoph, Holz, Mathias

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Année:

2018

Langue:

english

Fichier:

PDF, 3.58 MB

english, 2018

18

Tularemia Outbreak, Bulgaria, 1997–2005

Kantardjiev, Todor, Ivanov, Ivan, Velinov, Tzvetan, Padeshki, Plamen, Popov, Boris, Nenova, Roumiana, Mincheff, Milcho

Journal:

Emerging Infectious Diseases

Année:

2006

Langue:

english

Fichier:

PDF, 279 KB

english, 2006

19

Charged particle single nanometre manufacturing

Prewett, Philip D, Hagen, Cornelis W, Lenk, Claudia, Lenk, Steve, Kaestner, Marcus, Ivanov, Tzvetan, Ahmad, Ahmad, Rangelow, Ivo W, Shi, Xiaoqing, Boden, Stuart A, Robinson, Alex P G, Yang, Dongxu, Ha

Journal:

Beilstein Journal of Nanotechnology

Année:

2018

Langue:

english

Fichier:

PDF, 7.99 MB

english, 2018

20

Tip-based nano-manufacturing and -metrology

Gotszalk, Teodor, Jóźwiak, Grzegorz, Radojewski, Jacek, Fröhlich, Thomas, Füssl, Roland, Manske, Eberhard, Holz, Mathias, Ivanov, Tzvetan, Ahmad, Ahmad, Rangelow, Ivo W.

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Année:

2019

Langue:

english

Fichier:

PDF, 2.96 MB

english, 2019

21

Tip-based nano-manufacturing and -metrology

Gotszalk, Teodor, Jóźwiak, Grzegorz, Radojewski, Jacek, Fröhlich, Thomas, Füssl, Roland, Manske, Eberhard, Holz, Mathias, Ivanov, Tzvetan, Ahmad, Ahmad, Rangelow, Ivo W.

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Année:

2019

Fichier:

PDF, 2.96 MB

2019

22

Nano-line width control and standards using Lateral Pattern Definition technique

Michał Zaborowski, Dariusz Szmigiel, Teodor Gotszalk, Katerina Ivanova, Yanko Sarov, Tzvetan Ivanov, Burkhard E. Volland, Ivo W. Rangelow, Piotr Grabiec

Journal:

Microelectronic Engineering

Année:

2006

Langue:

english

Fichier:

PDF, 280 KB

english, 2006

23

New relations between norms of system transfer functions

Tzvetan Ivanov, Brian D.O. Anderson, P.-A. Absil, Michel Gevers

Journal:

Systems & Control Letters

Année:

2011

Langue:

english

Fichier:

PDF, 298 KB

english, 2011

24

Hysteresis in metal insulator semiconductor structures with high temperature annealed ZrO2/SiOx layers

Valentin K. Gueorguiev, Petya V. Aleksandrova, Tzvetan E. Ivanov, Jordanka B. Koprinarova

Journal:

Thin Solid Films

Année:

2009

Langue:

english

Fichier:

PDF, 497 KB

english, 2009

25

Thermally driven microgripper as a tool for micro assembly

Katerina Ivanova, Tzvetan Ivanov, Ali Badar, Burkhard E. Volland, Ivo W. Rangelow, Daniela Andrijasevic, Franz Sümecz, Stephanie Fischer, Manfred Spitzbart, Werner Brenner, Ivan Kostic

Journal:

Microelectronic Engineering

Année:

2006

Langue:

english

Fichier:

PDF, 197 KB

english, 2006

26

Molecular Epidemiology and Multidrug Resistance Mechanisms of Pseudomonas aeruginosa Isolates from Bulgarian Hospitals

Vatcheva-Dobrevska, Rossitza, Mulet, Xavier, Ivanov, Ivan, Zamorano, Laura, Dobreva, Elina, Velinov, Tzvetan, Kantardjiev, Todor, Oliver, Antonio

Journal:

Microbial Drug Resistance

Année:

2013

Langue:

english

Fichier:

PDF, 359 KB

english, 2013

27

First detection of OXA-24 carbapenemase-producingAcinetobacter baumanniiisolates in Bulgaria

Todorova, Bozhana, Velinov, Tzvetan, Ivanov, Ivan, Dobreva, Elina, Kantardjiev, Todor

Journal:

World Journal of Microbiology and Biotechnology

Année:

2014

Langue:

english

Fichier:

PDF, 257 KB

english, 2014

28

On Total Internal Reflection Investigation of Nanoparticles by Integrated Micro-Fluidic System

Sarov, Yanko E., Capek, Ignac, Ivanov, Tzvetan B., Ivanova, Katerina Zh., Sarova, Valentina A., Rangelow, Ivo W.

Journal:

Année:

2008

Langue:

english

Fichier:

PDF, 198 KB

english, 2008

29

Scanning probes in nanostructure fabrication

Kaestner, Marcus, Ivanov, Tzvetan, Schuh, Andreas, Ahmad, Ahmad, Angelov, Tihomir, Krivoshapkina, Yana, Budden, Matthias, Hofer, Manuel, Lenk, Steve, Zoellner, Jens-Peter, Rangelow, Ivo W., Reum, Alex

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Année:

2014

Langue:

english

Fichier:

PDF, 4.15 MB

english, 2014

30

Experimental setup for characterization of self-actuated microcantilevers with piezoresistive readout for chemical recognition of volatile substances

Filenko, Denis, Ivanov, Tzvetan, Volland, Burkhard E., Ivanova, Katerina, Rangelow, Ivo W., Nikolov, Nikolay, Gotszalk, Teodor, Mielczarski, Jerzy

Journal:

Review of Scientific Instruments

Année:

2008

Langue:

english

Fichier:

PDF, 1.21 MB

english, 2008

31

[IEEE 2009 Joint 48th IEEE Conference on Decision and Control (CDC) and 28th Chinese Control Conference (CCC) - Shanghai, China (2009.12.15-2009.12.18)] Proceedings of the 48h IEEE Conference on Decision and Control (CDC) held jointly with 2009 28th Chinese Control Conference - A characterization of solution sets of LTI differential equations

Delvenne, Jean-Charles, Ivanov, Tzvetan

Année:

2009

Langue:

english

Fichier:

PDF, 297 KB

english, 2009

32

Imaging Cellular and Viral Materials with Small Cantilevers Developed for High Speed Atomic Force Microscopy

Fantner, Georg, Ivanov, Tzvetan, Ivanova, Katerina, Gray, David, Rangelow, Ivo W, Hansma, Paul K, Belcher, Angela M

Journal:

MRS Proceedings

Année:

2007

Langue:

english

Fichier:

PDF, 10.92 MB

english, 2007

33

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 23 February 2014)] Metrology, Inspection, and Process Control for Microlithography XXVIII - Parallel SPM cantilever arrays for large area surface metrology and lithography

Cain, Jason P., Sanchez, Martha I., Gotszalk, Teodor, Ivanov, Tzvetan, Rangelow, Ivo W.

Année:

2014

Langue:

english

Fichier:

PDF, 1.79 MB

english, 2014

34

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2013)] Alternative Lithographic Technologies V - Scanning probe lithography approach for beyond CMOS devices

Durrani, Zahid, Tong, William M., Resnick, Douglas J., Jones, Mervyn, Kaestner, Marcus, Hofer, Manuel, Guliyev, Elshad, Ahmad, Ahmad, Ivanov, Tzvetan, Zoellner, Jens-Peter, Rangelow, Ivo W.

Année:

2013

Langue:

english

Fichier:

PDF, 1.22 MB

english, 2013

35

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 22 February 2015)] Metrology, Inspection, and Process Control for Microlithography XXIX - Self-actuated, self-sensing cantilever for fast CD measurement

Cain, Jason P., Sanchez, Martha I., Ahmad, Ahmad, Ivanov, Tzvetan, Reum, Alexander, Guliyev, Elshad, Angelov, Tihomir, Schuh, Andreas, Kaestner, Marcus, Atanasov, Ivaylo, Hofer, Manuel, Holz, Mathias,

Année:

2015

Langue:

english

Fichier:

PDF, 1.25 MB

english, 2015

36

Hairpin-resonator probe design and measurement considerations

Dankov, Plamen, Stefanov, Peter, Gueorguiev, Valentin, Ivanov, Tzvetan

Journal:

Journal of Physics Conference Series

Année:

2010

Langue:

english

Fichier:

PDF, 532 KB

english, 2010

37

Raster-Sonden-Mikroskopie mit Cantilever-Arrays (Scanning Probe Microscopy with Cantilever Arrays)

Rangelow, Ivo W., Ivanov, Tzvetan, Volland, Burkhard E., Dontsov, Denis, Sarov, Yanko, Ivanova, Katerina, Persaud, Arun, Filenko, Denis, Nikolov, Nikolaj, Zier, Michael, Schmidt, Bernd, Gotszalk, Teod

Journal:

tm - Technisches Messen

Année:

2006

Langue:

german

Fichier:

PDF, 439 KB

german, 2006

38

Thermographischer Detektor basierend auf einem neuartigen Mikro-Spiegel Sensor

Rangelow, Ivo W., Sinzinger, Stefan, Steffanson, Marek, Holz, Mathias, Ivanov, Tzvetan, Kleindienst, Roman, Kampmann, Ronald

Journal:

tm - Technisches Messen

Année:

2014

Fichier:

PDF, 1004 KB

2014

39

Detection and characterization of OXA-48-producing Klebsiella pneumoniae originated in Bulgaria

Sabtcheva, Stefana, Ivanov, Ivan N., Todorova, Bozhana, Simeonov, Yordan, Dobreva, Elina, Ivanova, Krasimira, Velinov, Tzvetan, Kantardjiev, Todor

Journal:

Journal of Chemotherapy

Année:

2015

Langue:

english

Fichier:

PDF, 106 KB

english, 2015

40

Information Inequality for Estimation of Transfer Functions: main results

Ivanov, Tzvetan, Anderson, Brian D.O., Absil, P.-A., Gevers, Michel

Journal:

IFAC Proceedings Volumes

Année:

2011

Langue:

english

Fichier:

PDF, 332 KB

english, 2011

41

Pattern-generation and pattern-transfer for single-digit nano devices

Rangelow, Ivo W., Ahmad, Ahmad, Ivanov, Tzvetan, Kaestner, Marcus, Krivoshapkina, Yana, Angelov, Tihomir, Lenk, Steve, Lenk, Claudia, Ishchuk, Valentyn, Hofmann, Martin, Nechepurenko, Diana, Atanasov,

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Année:

2016

Langue:

english

Fichier:

PDF, 2.82 MB

english, 2016

42

Scanning probe-based high-accuracy overlay alignment concept for lithography applications

Ishchuk, Valentyn, Guliyev, Elshad, Aydogan, Cemal, Buliev, Ivan, Kaestner, Marcus, Ivanov, Tzvetan, Ahmad, Ahmad, Reum, Alexander, Lenk, Steve, Lenk, Claudia, Nikolov, Nikolay, Glinsner, Thomas, Rang

Journal:

Applied Physics A: Materials Science & Processing

Année:

2017

Langue:

english

Fichier:

PDF, 10.05 MB

english, 2017

43

Al 2 O 3 /HfO 2 Multilayer High-k Dielectric Stacks for Charge Trapping Flash Memories

Spassov, Dencho, Paskaleva, Albena, Krajewski, Tomasz A., Guziewicz, Elzbieta, Luka, Grzegorz, Ivanov, Tzvetan

Journal:

physica status solidi (a)

Année:

2018

Langue:

english

Fichier:

PDF, 685 KB

english, 2018

44

Field emission from diamond nanotips for scanning probe lithography

Hofmann, Martin, Lenk, Claudia, Ivanov, Tzvetan, Rangelow, Ivo W., Reum, Alexander, Ahmad, Ahmad, Holz, Mathias, Manske, Eberhard

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Année:

2018

Langue:

english

Fichier:

PDF, 1.27 MB

english, 2018

45

Experimental study of field emission from ultrasharp silicon, diamond, GaN, and tungsten tips in close proximity to the counter electrode

Lenk, Claudia, Lenk, Steve, Holz, Mathias, Guliyev, Elshad, Hofmann, Martin, Ivanov, Tzvetan, Rangelow, Ivo W., Behzadirad, Mahmoud, Rishinaramangalam, Ashwin K., Feezell, Daniel, Busani, Tito

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Année:

2018

Langue:

english

Fichier:

PDF, 1.74 MB

english, 2018

46

Sharp GaN nanowires used as field emitter on active cantilevers for scanning probe lithography

Lenk, Claudia, Hofmann, Martin, Ivanov, Tzvetan, Ahmad, Ahmad, Lenk, Steve, Rangelow, Ivo W., Reum, Alexander, Reuter, Christoph, Holz, Mathias, Behzadirad, Mahmoud, Rishinaramangalam, Ashwin K., Feez

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Année:

2018

Langue:

english

Fichier:

PDF, 1.45 MB

english, 2018

47

PEO-PVP-NaIO 4 Ion-Conducting Polymer Electrolyte: Inspection for Ionic Space Charge Polarization and Charge Trapping

Hadjichristov, Georgi B., Ivanov, Tzvetan E., Marinov, Yordan G., Koduru, Hari Krishna, Scaramuzza, Nicola

Journal:

physica status solidi (a)

Année:

2019

Langue:

english

Fichier:

PDF, 3.13 MB

english, 2019

48

An Integrated in SEM Multi-Purpose AFM Instrument Utilizing an Active Cantilever

Holz, Mathias, Reum, Alexander, Ahmad, Ahmad, Ivanov, Tzvetan, Reuter, Christoph, Hofmann, Martin, Rangelow, Ivo W.

Journal:

Microscopy and Microanalysis

Année:

2019

Langue:

english

Fichier:

PDF, 848 KB

english, 2019

49

Tip-based electron beam induced deposition using active cantilevers

Holz, Mathias, Allen, Frances I., Reuter, Christoph, Ahmad, Ahmad, Hofmann, Martin, Reum, Alexander, Ivanov, Tzvetan, Rangelow, Ivo W.

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Année:

2019

Langue:

english

Fichier:

PDF, 1.17 MB

english, 2019

50

[IEEE 2009 European Control Conference (ECC) - Budapest (2009.8.23-2009.8.26)] 2009 European Control Conference (ECC) - Using H 2 norm to bound H â norm from above on real rational modules

Ivanov, Tzvetan, Anderson, Brian D.O., Absil, P.-A., Gevers, Michel

Année:

2009

Langue:

english

Fichier:

PDF, 12.62 MB

english, 2009